Introduction to the Institute of Micro Inertial Systems and Devices
Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Jiangsu Province
Director: Prof. Hongsheng Li
Personnel Composition
The Institute of Micro Inertial Systems and Devices at Southeast University (SEU) is the main body of the Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Jiangsu Province, which was founded in 1994. There are now 5 professors, 2 associated professors, 1 lecture and more than 60 master and doctoral students. The main research involves: micro-inertial instrument design technology and measurement-control technology, including: micro-gyroscope, micro-accelerometer and micro-inertial measurement unit design, processing, packaging, measurement and control technology; micro-inertial system theory and application about the micro-system composed of micro-inertial instrument, precision control system, data processing system, as well as the theory, design, development and application of integrated micro navigation, positioning, guidance and control system constituted by external information sources such as GPS.
Research Fields
With the development of MEMS technology, the institute started the research on micro-inertial instrument and micro-system technology at home since 1994 with the strong support of relevant ministries and commissions of China. After more than 20 years of efforts, a series of key technologies have been broken through, such as design, process, testing and packaging of micro-inertial instruments, and a micro-inertial instrument and micro-inertial measurement system with good performance have been successfully developed.
In 2004, with the approval of the Ministry of Education, a second-level discipline of microsystems and measurement and control technology was set up independently under the first-level discipline of instrumentation science and technology. Main research directions:
a) silicon micro-mechanical inertial instrument;
b) quartz micro-mechanical inertial instrument;
c) quartz micro-mechanical resonator/microbalance and related technology;
d) theory and design of new sensors;
e) high-precision gravimeter and related technology.
Research Results
The institute has achieved a lot since the 1960s. The liquid floated gyroscope and dynamic tuned flexible gyroscope have been designed and developed by ourselves. In recent years, it has undertaken more than 50 national 863 projects, National Natural Science Foundation, provincial and ministerial projects, various fund projects and entrusted projects by enterprises and institutions. Single degree of freedom silicon micro-gyroscopes with horizontal and vertical axes, two degrees of freedom silicon micro-gyroscopes, tri-axial gyroscopes and silicon micro-resonant accelerometers were independently designed and developed. 5 monographs (won 1 prize for Jiangsu excellent textbooks) were published and 2 large-scale design manuals were compiled. The institute has won 2 science and technology awards from the National Defense Science and Technology Commission, 4 science and technology awards from provincial ministries and commissions, and 1 provincial teaching award.
Here are some research outcomes and experimental equipment of our institute:
LH-2 type YT-1 type Permanent magnet motor
flexible gyroscope flexible gyroscope
Single degree of freedom horizontal axis silicon micromachined gyroscope
Two-degree-of-freedom horizontal axis silicon micromachined gyroscope
Silicon micro-resonant accelerometer
Probe stage Mounter Clean room Temperature control box